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Vacuum Fiber Unit

FU-V Series

Installation Manual

Note

• The vacuum side fibers and the optical integrators are packed after being

cleaned with alcohol. Make sure that there is no oil or dust attached when

unpacking.

• After mounting on the vacuum chamber, bake before using. Make sure that

the baking temperature does not exceed the ambient temperature.

• Remove the atmosphere side fiber while baking.

• This unit uses glass components. Be careful not to drop the unit or subject it

to shock or heat resulting from rapid temperature change. When fastening a

nut, make sure the torque is within the prescribed values.

• When fastening a nut to the optical integrator, make sure the stress in the

bending direction is not applied to the optical integrator. When fastening the

fixing nut on the atmosphere side fiber, make sure not to fasten with the

fixing nut on the vacuum side fiber fixed.

CAUTION

• When mounting the lens attachment (F-V Series), make sure to use the

internal washer supplied with the lens attachment to prevent it from

becoming loose.

 Vacuum side fiber FU-V84/FU-V84L

350°C heat-resistant fiber unit - 2

M4 nut, spring washer, flat washer - 4 each

M5 nut, spring washer - 2 each

 Optical integrator FU-VJ1

Optical integrator - 2

M5 nut, spring washer, flat washer, O-ring - 2 each

 Atmosphere side fiber FU-V7FN

70°C heat-resistant fiber unit - 2

Fiber cutter

1 Make a 5.1 hole in the chamber (flange).

The degree of roughness for the atmosphere side must be 1.6Rz or more

(ISO4287-1997).

2 Attach the O-ring on the optical integrator and insert

it into the mounting hole from the atmosphere side.

3 Insert the flat washer and spring washer from the

vacuum side and fix with the M5 nut.

Tightening torque 0.5N·m or less

4 Attach the M5 nut and spring washer in this order on

the optical integrator to prevent the vacuum side fiber

unit from loosening.

7 mm or more of the threaded part of the optical integrator must remain.

5 Mount the vacuum side fiber unit and fix it using the

fixing nut supplied with the fiber.

Tightening torque 0.5N·m or less

Checking the Package Contents

Fixing nut

FU-V84 FU-V84L

Fixing nut

Mounting method

+0.1

–0

Atmosphere side Vacuum side

2 to 12 mm (when the lock nut and spring washer are used)

ø5.1

+0.1

–0

Rz1.6

2 to 16mm (when the lock nut and spring washer are not used)

O-ring

7 mm or more

Lock nut

Spring washer

Lock nut

Fixing nut

96M00696

1 2

FU-V Series 1
E 1110-2 2

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Vacuum Fiber UnitFU-V SeriesInstallation ManualNote• The vacuum side fibers and the optical integrators are packed after being cleaned with alcohol. M

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rodolfo 29 Jan 2025 | 03:03:10

Hola

Keyence FU-V Series Manual do Utilizador

Consulte online ou descarregue Manual do Utilizador para Sensores Keyence FU-V Series. KEYENCE FU-V Series User Manual Manual do Utilizador

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